Thickness Determinination Of Thin Solid Films By Angle-Resolved X-Ray Fluorescence Spectrometry Using Monochromatized Synchroton Radiation

Thickness measurements by the method of angle-resolved, self-ratio X-ray fluorescence spectrometry (AR/SR/XFS) have been carried out on thin solid films using monochromatized synchrotron radiation at the Bonn storage ring ELSA. Synchrotron radiation was monochromatized by means of a double-crystal monochromator and fluorescence radiation was detected by a Si(Li) semiconductor detector. The results for sample systems consisting of Au on Si, Cr on Si02 and Ti02 on alkali-free glass are very satisfactory and agree well with results obtained by other methods.

Author
W Schmitt Et Al
Origin
Physikalisches Inst Der Universitat Bonn, Germany
Journal Title
Schott Research 1993-1995 311-315
Sector
Special Glass
Class
S 1165

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Thickness Determinination Of Thin Solid Films By Angle-Resolved X-Ray Fluorescence Spectrometry Using Monochromatized Synchroton Radiation
Schott Research 1993-1995 311-315
S 1165
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