Technique Devised For Sputtering Ain Thin Films

Sputtering techniques are used in various industrial sectors, including semiconductors, plastics and glasses. Yet, even though principles of sputtering processes are documented in some publications, a knowledge gap exists between theories and practices. To bridge this gap, a systematic study of a sputtering process was initiated at Alfred University. Preliminary results on aluminum nitride (AIN) thin films are reported here.