Subsurface Damage In Microgrinding Optical Glass

Subsurface damage induced by microgrinding of glass is an important characteristic of the resulting surface, since any subsequent manufacturing process must remove the subsurface damage left by the previous process. In this paper the questions are asked, i) How can subsurface damage in a brittle material be estimated from the measured surface microroughness? ii) How can subsurface damage among brittle materials be correlated to their near-surface mechanical properties? & iii) How is the resulting surface quality affected by material removal under loose abrasive microgrinding at fixed nominal pressure (lapping) or by deterministic microgrinding under fixed infeed rate?