Sputtering Silicon Layers On Glass

Silicon as a raw material for coatings on glass has become important during the last decade. Sputtering silicon on glass is always applied by reactive processes. The desired materials in the thin film layer stacks are, of course, either Si02 or Si3N4. Silicon oxide is needed because of its low index of refraction, especially for anti-reflection layers, or so called enhanced mirrors. Silicon nitride is used because of its excellent hardness and density, especially for protecting the sputtered soft layers from corrosion and against scratch sensitivity.