Plasma Impulse Chemical Vapor Deposition

Thermal evaporation of solids onto substrates is the most commonly used technique in the production of optical coatings. This statement holds as long as we focus on optical interference systems such as those used for optical filters or for eyeware. In addition to conventional plasma vapor deposition (PVD) technologies today, plasma impulse chemcial vapor deposition (PICVD) is used at Schott Glassworks to coat substrates up to 250mm in diameter. Operating the deposition process in a pulsed mode rather than a continuous mode overcomes many limitations of the existing technologies and opens new applications for coatings.

Author
J Segner
Origin
Schott Glaswerke, Germany
Journal Title
Schott Research 1993-1995 317-343
Sector
Special Glass
Class
S 1166

Request article (free for British Glass members)

Plasma Impulse Chemical Vapor Deposition
Schott Research 1993-1995 317-343
S 1166
Are you a member?
This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.
6 + 11 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.