Oh Related Capacitance Voltage Recovery Effect In Mos Capacitors Passivated By Zno-B203-Si02-Al203-P205 Glasses With Varied Sro Contents

The characteristics of MOS capacitors passivated by ZnO-B203-Si02-Al203-P205 glasses with various contents of water in these glasses were investigated. As OH absorption coefficients in the series of glasses increased, there was an increasing adverse effect on the recovery of hysteresis C-V curve shifts. Water contents were related to the SrO contents in the passivating glasses.

Author
K Kobayashi
Origin
Toshiba, Japan
Journal Title
Glass Technology 37 3 1996 99-100
Sector
Special Glass
Class
S 1037

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Oh Related Capacitance Voltage Recovery Effect In Mos Capacitors Passivated By Zno-B203-Si02-Al203-P205 Glasses With Varied Sro Contents
Glass Technology 37 3 1996 99-100
S 1037
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