Ion-Beam Analysis Investgations On Multilayer Devices For Visible Optics

RBS (Rutherford backscattering spectrometry) and the 15N technique have been applied to determine stoichiometries and thicknesses of films in two multilayer systems for visible optics which are produced by reactive evaporation (EV) and by reactive low-energy ion plating (IP). Besides the desired data on the various films, information on the ion-beam straggling is obtained and limits for ion-beam analysis on such systems are calculated.

Author
W Wagner Et Al
Origin
Johan-Wolfgant-Goethe-Universitat, Germany
Journal Title
Schott Research 1993-1995 461-465
Sector
Special Glass
Class
S 1171

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Ion-Beam Analysis Investgations On Multilayer Devices For Visible Optics
Schott Research 1993-1995 461-465
S 1171
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