Effect Of Incorporation Of Nitrogen On The Structure And Dielectric Properties Of Modified Oxide Sol-Precipitated Borosilicate Glasses And Glass Ceramics

Glasses and glass-ceramics have received considerable attention as substrate materials in electronic packaging because of their low dielectric constant at 1 MHz. It is also known that low molecular weight species lower the contribution to electronic polarization which is primarily responsible for changes in the dielectric constant at these frequencies. In this study, borosilicate gels have been synthesized using a modified oxide sol-precipitation process utilizing oxide precursors. Nitridation of these gels has been initiated by combining air and ammonia heat treatments at different temperatures.