After a short overview of recent analytical techniques for compositional surface analysis and the determination of concentration depth profiles, the principle, instrumentation and the performance of routinely used electron spectroscopic and mass spectrometric methods, namely photo and Auger electron spectroscopy, as well as secondary ion and secondary neutral mass spectrometry, are described. The application of these techniques to electrically insulating surfaces and layer strutures is particularly emphasized by corresponding practical examples. Secondary neutral mass spectrometry is specifically addressed with regard to the potentialities of the novel high frequency mode of electron-gas secondary neutral mass spectrometry for quantitative composition analysis and high-resolution depth profiling of electrically nonconducting sample structures.
