Characterization Of Thin Oxide Films On Glass: A Part Of The Problem-Solving Process

The potential of the problem-oriented use of some relevant techniques of thin film analysis (SIMS, IBSCA, NRA, RBS, bending disc, GIXR) to determine the film properties composition, stress and density is demonstrated on Ti02 and Si02 single layers and multilayer systems deposited by PVD, CVD and sol-gel processes on glass. The film density, which depends strongly on the deposition conditions, seems to be a key quantity that determines various other corresponding film properties.