Chalcogenide Glass Thin Films And Planar Waveguides

Over the past decade, a comprehensive development program to produce high-purity Ga:La:S and Ge:S glasses and further process these glasses into thin films has been carried out. This paper discusses the general properties of these glass systems and the techniques used to obtain thin films. The ability to deposit high-quality films ranging in thickness from nanometers to several millimeters by several methods, including chemical vapour deposition technique, is demonstrated.