An Assessment Of Bulk Metallic Glasses For Microelectromechanical System Devices

Metallic glasses were born purely of academic interest and earlier commercial attempts were limited due to the low thickness of the samples. However, with the successful fabrication of bigger samples using multi-component system, there has been renewed interest in the commercial applicability of bulk metallic glasses as they offer promising mechanical, tribological and other properties which make the commercialisation aspect lucrative. Through this study, an attempt has been made to assess the applicability of bulk metallic glasses as a material for Microelectromechanical System (MEMS) applications.