Advanced Sputter Coating Processes For Glass: Application Of Plasma Emission Control To Cylindrical Magentrons

Over the last decade, the cylindrical magnetron has emerged as the leading technology for sputter coatings on glass. The ability to deposit a wide range of technologically critical films such as Ti02, Si02 and Si3N4 has enabled the continued evolution and growth of low-emissivity, display and other coating applications. However, the need to deposit more complex multi-layer films at higher deposition speeds with improved efficiency and cost continues to push the performance requirements.