Vertical In-Line Sputter Plants For Float Glass

This article describes the GC 60V vertical in-line sputter plants for float glass are for the deposition of thin film, metallic and oxidic multi-layer systems on flat glass in a continuous single-pass mode at substrate temperatures of up to 300 deg C. Manufactured by Von Ardenne, the main applications cover the fields of thin-film solar cells based on glass as the carrier of the layers and a-Si or compound semiconductors including CdTe and CIG(S) as abosorber layers.