The GC124 V/CR vertical in-line sputter coater for displays, manufactured by Von Ardenne is, says the German company, ideal for the coating of glass substrates with different multi-layer systems, in particular low-Ohm TCO-layers and/or layer systems, typically used for flat panel display production. The GC124 uses Physical Vapour Deposition based on magnetron sputtering in metallic and reactive process modes. Cleaned and dried substrates are loaded on a vertical substrate carrier, whereas various substrate sizes can be applied. After vacuum locking, the substrates are preheated in the entrance buffer chamber. The cyclic carrier movement is transformed into a continuous transport in the following transfer chamber. When passing through the transfer chamber, the final substrate temperature of 200-300 deg C is adjusted. See www.vonardenne.biz for more details.
