Photostructurable glasses are important materials for applications in microsystems. They enable structures with high aspect ratios and a high dependability of mechanical, optical and chemical properties in a large range of temperatures. The exposure of photostructurable glasses to UV laser radiation, as a rapid prototyping technique, is an alternative method to the exposure by a mask aligner.
Origin
Technic Univ Iimenau, Germany
Journal Title
Glass Sci Technol 77 5 2004 249-252
Sector
Special Glass
Class
S 2880