Ultra-Fast, Ultra-Small Plasma Arc Detectors

The INFICON Sion Plasma Arc Detector provides, according to the manufacturer, real-time, high-power analyses of plasma micro-arcing which can cause damage to the target, the film being deposited, and even the wafer surface in chemical vapour deposition (CVD) and ETCH processes. More compact than any other device on the market, says INFICON, the plasma arc detector employs the INFICON FabGuard Integration and Analyses System to detect arcs that were previously undetectable. The result is reduced waste, improved yields, and profitability. For more information please see: www.inficon.com