Preparation of thin films of material is very easy today. Development of deposition techniques is the main goal in order to obtain better films with excellent properties. There are many different techniques which lead to a very good quality of films. This paper is a short revision of the principles, characteristics, equipment, raw materials and applications of the more used techniques in order to obtain good films, overall applied to the microelectronics and optics industries.
Origin
Inst De Ceramica Y Vidrio, Madrid
Journal Title
Bol Soc Esp Ceram Vidrio 33 5 1994 245-258
Sector
Special Glass
Class
S 835