In this study CeO2 precursor thin films were deposited onto glass substrates at a room temperature from an aqueous solution by applying constant electrical field and their optical properties were investigated. The precursor was an aqueous solution of Ce(NO3)3-6H2O, M(NO3)3-6H2O (M:Gd,Sm,Y) and NH3(aq). The thin film was deposited on the glass substrate of the minus electrode side. By applying the electrical field of 2.6-3.6V, the Ce(OH) thin film was effectively deposited on glass substrates at room temperature. The as-deposited film was amorphous, and a crystalline phase of CeO2 can be obtained after annealing at 823 K for 5 h in air. Spectral transmission curves of visible to ultraviolet light region through CeO2 films were measured and about 10 to 30 % absorption peaks were observed around 310 to 330 nm. The relation between growth conditions, surface morphology and their interceptor properties of ultraviolet light region were studied.
