Stress And Density Of Thin Ti02 Films Produced By Different Methods

Stress, density and refractive behaviour are analyzed for Ti02 layers deposited by reactive evaporation (RE), ion plating (IP), plasma impulse chemical vapour deposition (PICVD) and spin coating (SP) from bending of the substrate and by means of Rutherford Backscattering Spectroscopy (RBS), respectively.

Author
C R Ottermann Et Al
Origin
Schott Glaswerke, Germany
Journal Title
Schott Research 1993-1995 295-301
Sector
Special Glass
Class
S 1164

Request article (free for British Glass members)

Stress And Density Of Thin Ti02 Films Produced By Different Methods
Schott Research 1993-1995 295-301
S 1164
Are you a member?
This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.
13 + 5 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.