Stress, density and refractive behaviour are analyzed for Ti02 layers deposited by reactive evaporation (RE), ion plating (IP), plasma impulse chemical vapour deposition (PICVD) and spin coating (SP) from bending of the substrate and by means of Rutherford Backscattering Spectroscopy (RBS), respectively.
Origin
Schott Glaswerke, Germany
Journal Title
Schott Research 1993-1995 295-301
Sector
Special Glass
Class
S 1164