Some Properties Of Rf Planar Magnetron Sputtered Corning 7059 Glass Films

The influence of the sputtering parameters on deposition rate, refractive index, optical losses and stoichiometry of low-loss films produced by magnetron sputtering in an oxygen-argon mixture is described.

Author
H Jerominek Et Al
Origin
Unknown
Journal Title
Thin Solid Films 1987 146 2 191-200
Sector
Special Glass
Class
S 62

Request article (free for British Glass members)

Some Properties Of Rf Planar Magnetron Sputtered Corning 7059 Glass Films
Thin Solid Films 1987 146 2 191-200
S 62
Are you a member?
This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.
1 + 0 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.