Semiconductor Passivation And Insulation Properties For Hydroxyl- And Fluoride-Free Zno-Sio2-B2O3-Al2O3 Glasses Stabilised By Increased P2O5

Fluoride- and OH-free phosphate-stabilised zinc boroaluminosilicate glasses for semiconductor passivation or insulation have been investigated with regard to compositional dependence of thermal expansion, viscosity and capacitor properties.

Author

K Kobayashi

Origin

Toshiba Vlsi Research Center

Journal Title

J Am Ceram Soc 1990 73 11 3500-3502

Sector

Special Glass

Class

S 459

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Your chosen publication Semiconductor Passivation And Insulation Properties For Hydroxyl- And Fluoride-Free Zno-Sio2-B2O3-Al2O3 Glasses Stabilised By Increased P2O5

Journal Title J Am Ceram Soc 1990 73 11 3500-3502

Class S 459

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Semiconductor Passivation And Insulation Properties For Hydroxyl- And Fluoride-Free Zno-Sio2-B2O3-Al2O3 Glasses Stabilised By Increased P2O5

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