BaTi03 glass-ceramic thin films were deposited on silicon substrates by the sol-gel method. The films exhibited a mixed structure of glass phase and BaTi03 grains tens of nanometers in diameter, and had a high dielectric constant, low leakage current, and dielectric loss.
Origin
Inst Materials Research, Singapore
Journal Title
J Am Ceram Soc 85 2 2002 496-498
Sector
Glass Ceramics
Class
GC 450