Reactive Ion Etching (Cf4/Ar) And Ion Beam Etching Of Various Glasses For Diffractive Optical Element Fabrication

This paper reports on the reactive ion etching (RIE) and ion beam etching (IBE) of commercially available glasses and their usability for the fabrication of diffractive optical elements as an alternative for expensive quartz glass.

Author

J Schmitt Et Al

Origin

Rheinmain University Of Applied Sciences, Germany

Journal Title

Int J Appl Glass Science 4 9 2018 499-509

Sector

Special Glass

Class

S 4466

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Journal Title Int J Appl Glass Science 4 9 2018 499-509

Class S 4466

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Reactive Ion Etching (Cf4/Ar) And Ion Beam Etching Of Various Glasses For Diffractive Optical Element Fabrication

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