Properties Of Rf Planar Magnetron-Sputtered Corning 7059 Glass Films

A study has been made of the influence of the sputtering process on film deposition rate, refractive index, optical losses and stoichiometry.

Author

H Jerominek Et Al

Origin

Unknown

Journal Title

Thin Solid Films 1987 146 2 191-200

Sector

Special Glass

Class

S 124

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Journal Title Thin Solid Films 1987 146 2 191-200

Class S 124

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