This article looks into some of the aspects regarding thin film solar applications, with special emphasis on generators for sputter deposition, modular DC systems, arc management and generators for PECVD coating. Higher precision process control and supreme arc management, with adaptable parameters to provide minimal disturbances in the plasma process and to obtain optimised results in terms of film quality, homogeneity and uniformity over the whole substrate must be respected.
Origin
Huttinger Gmbh, Germany
Journal Title
Glass Coatings 2/2006 25-29
Sector
Special Glass
Class
S 3135