Tubular Si02-glass membranes with thin, dense Si02 layers on porous glass supports were prepared via sputtering, using the novel sputtering apparatus for tubular supports. This apparatus had a holder for tubular supports and a rotation mechanism. The sputtering conditions of the membranes were investigated.
Origin
Osaka National Research Inst, Japan
Journal Title
J Am Ceram Soc 82 5 1999 1325-1328
Sector
Special Glass
Class
S 1663