Preparation Of Tubular Silica-Glass Membranes With Thin Silica Layers By Sputtering, Using The Novel Sputtering Apparatus For Tubular Supports

Tubular Si02-glass membranes with thin, dense Si02 layers on porous glass supports were prepared via sputtering, using the novel sputtering apparatus for tubular supports. This apparatus had a holder for tubular supports and a rotation mechanism. The sputtering conditions of the membranes were investigated.

Author
K Kuraoka & T Yazawa
Origin
Osaka National Research Inst, Japan
Journal Title
J Am Ceram Soc 82 5 1999 1325-1328
Sector
Special Glass
Class
S 1663

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Preparation Of Tubular Silica-Glass Membranes With Thin Silica Layers By Sputtering, Using The Novel Sputtering Apparatus For Tubular Supports
J Am Ceram Soc 82 5 1999 1325-1328
S 1663
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