Power Supplies For Dual Magnetron Sputtering

In this article the author explains how dual magnetron sputtering has evolved to become a dominant technique for thin films on glass and describes a new pulsed power supply.

Author
D J Christie
Origin
Advanced Energy Industries Usa
Journal Title
Glass International Dec-Jan 2014 45-46
Sector
General
Class
G 4204

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Power Supplies For Dual Magnetron Sputtering
Glass International Dec-Jan 2014 45-46
G 4204
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