Phase Separation And Crystallisation In Nanosized Spin-On Glass Films Used In Microelectronics

The preparation of thin glassy films for micro electronics planar technology is discussed. Silicate films, spin coated on semiconductor wafers from TEOS derived sols modified by inorganic dopants including a range of salts and acids, were investigated.

Author
O Shilova
Origin
Institute For Silicate Chemistry, Russia
Journal Title
Glass Technology 45 2 2004 59-61
Sector
Special Glass
Class
S 2786

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Phase Separation And Crystallisation In Nanosized Spin-On Glass Films Used In Microelectronics
Glass Technology 45 2 2004 59-61
S 2786
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