Pb-Diffusion Barrier Layers For Pbti03 Thin Films Deposited On Si Substrates By Metal Organic Chemical Vapour Deposition

The interfaces between metal organic chemical vapour depoisted PbTiO3 thin films and various diffusion barrier layers deposited on Si substrates were investigated by transmission electron microscopy.

Author
C S Hwang And H J Kim
Origin
Seoul National University, Korea
Journal Title
J Am Ceram Soc 78 2 1995 337-341
Sector
Special Glass
Class
S 841

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Pb-Diffusion Barrier Layers For Pbti03 Thin Films Deposited On Si Substrates By Metal Organic Chemical Vapour Deposition
J Am Ceram Soc 78 2 1995 337-341
S 841
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