A New Lpcvd Technique For Producing Borophosphosilicate Glass Films By Injection Of Miscible Liquid Precursors

A simple technique based on the injection of miscible liquid precursors has been developed. Variations in growth rate and composition are discussed.

Author

R A Levy, P K Gallagher, F Schrey

Origin

Unknown

Journal Title

J Electrochem Soc 1987 134 2 430-436

Sector

Special Glass

Class

S 54

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Your chosen publication A New Lpcvd Technique For Producing Borophosphosilicate Glass Films By Injection Of Miscible Liquid Precursors

Journal Title J Electrochem Soc 1987 134 2 430-436

Class S 54

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