Microlithography - More Performance For Chips

Calcium-fluoride crystals play a key role in further advancing the state of the arti in microlithography. Schott ML produces this high-quality optical material, which will allow microchip fabricators to break the 100-nanometer feature barrier.

Author
Dr E Moresen & M Weber
Origin
Unknown
Journal Title
Schott Info No 92 1999 2-4
Sector
Special Glass
Class
S 1943

Request article (free for British Glass members)

Microlithography - More Performance For Chips
Schott Info No 92 1999 2-4
S 1943
Are you a member?
This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.
12 + 2 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.