Microstructurable glasses of the system Li20-Al203-Si02 are objects of research at the Ilmenau Technical University. These glasses also contain alkali oxides and dopants. The dopants are important for microstructuring. Main directions of research are: special glass materials, structuring technolgies, joining processes and applications. The glasses can be structured with a photolithographic process using; UV exposure, thermal treatment and etching. Using this process, it is possible to make holes, structures with a defined depth, structures with various depths and three-dimensional structures without undercut. Different glass sheets can be joined with a thermal process. Depending on the thermal expanison coefficient glass/metal compounds may be realized by microelectroplating.
