Magnetron Sputtering Cathodes - Circular And Linear Production

Good results in thin film quality and process efficiency are fundamental in the vacuum industry and are based on optimum materials and manufacturing. In this article, the Kurt J Lesker Company gives a basic idea of its working procedures and methods, also presenting one of its flagship products - Torus magnetron sputtering sources.

Author
Un-named
Origin
Unknown
Journal Title
Glass Coatings 4/2006 22-25
Sector
Flat glass
Class
F 2237

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Magnetron Sputtering Cathodes - Circular And Linear Production
Glass Coatings 4/2006 22-25
F 2237
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