Magnetically Levitated High Vacuum Pumps

Alcatel Vacuum Technology is the third largest supplier of vacuum technology. With its new brand name, ADIXEN, the company is present worldwide with a network of subsidiaries, service centres and agents. Alcatel produces more than several thousand magnetically levitated turbo molecular pumps per year. The largest quantity is used in semiconductor production applications, in very hard conditions in terms of gases and cycle duty, but there is also a wide installed base in glass coating applications, as described in this article.