Ion Beam Synthesis Of Sic Layers On Si (In Spanish)

In this work the synthesis of SiC/Si structures formed by ion implantation of carbon in silicon is investigated.

Author

A Perez-Rodriguez Et Al

Origin

Univ Barcelona, Spain

Journal Title

Bol Soc Esp Ceram Vidrio 36 2-3 316-320

Sector

Special Glass

Class

S 1200

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Journal Title Bol Soc Esp Ceram Vidrio 36 2-3 316-320

Class S 1200

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