Investigations Of Large Area Coating Equipment By Optical Measurements And Novel Fit Routines

In large area coating, the homogeneity of growing films is often one of the crucial properties of the coating process. This homogeneity is critically influenced by the construction of the process chamber, arrangement of the magnetrons and set-up of the gas inlets. In order to identify new ways to improve sputter equipment, film homogeneity has to be thoroughly studied. Often, optical methods can be employed for this purpose. In this article it is demonstrated how optical measurements, combined with a novel fit algorithm, can be used to gain insight into the details of the reactive sputter process of tin doped indium oxide, and open new ways for improvements in sputter equipment.