Sophisticated arc management is a key requirement of power supplies for many plasma processes. The specific response to each arc that occurs in the plasma acts to stabilise the sputter process and ensures high-quality coating results. Minimising the response time of the generator is of the highest importance. This prevents arcs from causing an interruption in the process, thus reducing or eliminating irregularities in the coating.
Origin
Huttinger Elektronik, Germany
Journal Title
Glass Coatings 1/2005 16-19
Sector
Flat glass
Class
F 1748