Flowforming, from US-based Dynamic Flowform, is a thermo-mechanical process used to form rotatable sputtering target tubes to net shape. According to the company, the flowforming process improves the sputtering yield of the target because it increases material density to 100%, creates a finer grain structure & enhances crystallographic texture. Flowformed target tubes can have straight walls or varying wall thicknesses such as "dog bone" style. Sputtering yield, as defined as sputtering atoms per ion, is correlated to atomic density. During the flowforming process, the preform material is plastically deformed & the cross sectional area of the preform wall thickness is reduced by at least 50%. This cold work rids the material of any porosity or inclusions in the preform material, making the flowformed target 100% dense, which improves sputtering yield.
