High-rate sputtering finds its applications in many diverse fields. Founded by engineers experienced in vacuum & thin film technologies, FHR now provides targets for the micro-electronic, glass coating & any other sector in the coating industry. This article presents three products: Web Coating System RC200, designed to meet the requirements of thin film deposition on web with up to 200mm coating width; UPS O3 Universal Process Control System,is optimal for high speed process controlling, with its main application being the pressure control of vacuum processes; & Multi Purpose Sputtering System MS 150x4; which is a versatile system for thin film deposition processes in small scale production & R&D for PVD processes by DC- and RF-sputtering with pre-treatment facilities by heating & sputter etching.
