Heraeus: Innovative Technique For Reduced Target Costs For Zao

The most important application for ceramic sputtering targets are TCO layers, using typical materials such as doped oxides from indium, tin or zinc. A well known example is the indium-tin-oxide (ITO) layer used in all modern flat panel displays, and another increasingly important application is zinc-aluminium-oxide (ZAO), only available as a planar target until now. heraeus Thin Film Materials has now developed a ZAO product which enabled a sizeable reduction in sputter target cost.