Describes the use of x-ray fluorescence. By comparison with other available methods, we shall demonstrate that this direct measurement technique is accurate, simple, fast, reproducible, and nondestructive. With the use of this technique, flow and reflow profiles of phosphosilicate glass will be illustrates at different phosphorous concentrations and representative thermal cycles.
Origin
Unknown
Journal Title
J. Electrochem. Soc., 1985, 132 (6) 1472-9
Sector
Primary Papers
Class
PP 568