Emerging Applications Of Spectroscopic Ellipsometry

Spectroscopic Ellipsometry (SE) is routinely used to measure optical coatings. It is similar to spectrophotometric (R/T) measurements in that both measure the properties of light upon reflection or transmission from a coating or stack. Improvements in accuracy, speed, and spectral coverage have increased its utility. Emerging areas utilise the versatility and functionality of SE for single and multi-layer stacks.