An x-ray energy dispersive system consisting of a lithium drifted silicon detector and a computer as a multichannel analyser, is used to determine the elemental composition of glass, glass ceramics, and other materials, with the scanning electron microscope. In general, all elements of atomic number 11 ?(sodium) or higher can be detected in selected micro areas when present in amounts from 0.25 to 0.5% or higher. Resolution of the analysis site to volumes as small as approximately 2 um3 can be attained. The principles and equipment involved in the techniques as well as the advantages and limitations are described. Typical applications are given for a wide variety of materials and problems. The semi quantitative aspects of the method are illustrated for glasses containing varying amounts of titanium and lead.
