Effect Of Deposition Conditions On Physical Properties Of Sputtered Silicon Oxynitride Thin Films On Float Glass

Silicon oxynitride layers have been widely used to tailor the optical performance and mechanical resistance of multilayer optical coatings. The key issue for their reliable large-scale application on a glass substrate is the effect of technological parameters on their performance. This article reports on the interrelationship between the conditions of the reactive magnetron deposition process and composition, structure and in turn optical and mechanical properties.