Development Of A Compact Scanning Transmission X-Ray Microscope (Stxm) At The Photon Factory

This paper reports a compact scanning transmission X-ray microscope (STXM) newly designed and developed at the Photon Factory. Piezo-driven linear stages are used for all of the coarse stages in the microscope to make the microscope compact, stable, and suitable for use at the end stations of multi purpose beam-lines already in operation. Fully digitised control and detection electronics are implemented to realise efficient data acquisition. The performance of the STXM is demonstrated in both imaging and spectroscopic experiments.