Constrained-Film Sintering Of A Borosilicate Glass: In Situ Measurement Of Film Stresses

In-plane stresses developed in a borosilicate glass (BSG) film during its constrained sintering on a rigid substrate was measured. Samples were prepared by casting BSG slurries on a silicon substrate and sintered inside a hot stage at 715 deg C just above the glass-softening temperature. In-plane stresses from the constrained-film sintering were determined by wafer-curvature measurements using an optical system.

Author
J Bang And G Lu
Origin
Virginia Polytechnic Inst & State University, Usa
Journal Title
J Am Ceram Soc 78 3 1995 813-815
Sector
Special Glass
Class
S 853

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Constrained-Film Sintering Of A Borosilicate Glass: In Situ Measurement Of Film Stresses
J Am Ceram Soc 78 3 1995 813-815
S 853
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