Composition Of Titania Coatings Deposited By Different Techniques

Quantitative element concentrations in titania films produced by different deposition techniques (evaporation, sputtering, ion-assisted deposition, ion plating and dip coating) have been determined by means of Rutherford Backscattering Spectrometry and Nuclear Reaction Analysis. Large differences of the hydrogen content are found for the various production techniques and the related deposition parameters, which correlate with the refractive index of the respective film.